Thermal Investigations on CMOS Integrated Micro-Hot-Plates Using IR Thermography

In this paper, investigations on absolute temperature measurements using IR-Thermography of CMOS integrated micro-hot-plates (μHP) are presented. The results of using two different approaches, emissivity correction and black paint coating, are presented and compared with respect to simulation and electrical testing results. In addition, FIB/SEM investigations were used for surface investigations and determination of possible influences to the thermal behaviour by black paint coating process.