Image enhancement algorithm by combining brightfield and darkfield images is presented on this paper. The result combines the unique features of each illumination plus the power of differential interference contrast (DIC) even in the absence of DIC hardware and sophisticated software. The effectivity of the method is illustrated on actual samples with height variation.

differential interference contrast, failure analysis, optical microscopy
This content is only available as a PDF.
Copyright © 2012 ASM International. All rights reserved.
2012
ASM International
Topics
Optical light microscopy Semiconductor wafer fabrication
Issue Section:
Poster Session
You do not currently have access to this content.