High resolution optical imaging is critical in assisting backside circuit edit (CE) and optical probing navigation. In this paper, we demonstrated improved optical image quality using VIS-NIR narrow band light emitting diode (LED) illumination in various FIB and optical probing platforms. The proof of concept was demonstrated with both common non-contact air gap lenses and solid immersion lenses (SIL).

focused ion beam, integrated circuit editing, light emitting diodes, non-contact air gap lens, optical probing, solid immersion lens
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Copyright © 2012 ASM International. All rights reserved.
2012
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Circuit Edit
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