Abstract
In this paper, we describe improved hardware to connect a semiconductor tester or applications board to a laser scanning microscope (LSM) for performing dynamic laser stimulation (DLS). The hardware, called DXGlue, simplifies the DLS workflow and enables new applications. We describe its precise monitoring of the fail rate and fail mode, its use for time resolved DLS and the enabling of long test loops with short laser dwell times.
This content is only available as a PDF.
Copyright © 2012 ASM International. All rights reserved.
2012
ASM International
Issue Section:
Photon Based Techniques
You do not currently have access to this content.