Abstract

Laser voltage probing is the newest generation of tools that perform timing analysis for electrical fault isolation in advanced failure analysis facilities. This paper uses failure analysis case studies on SOI to showcase the implementation of laser voltage probing in the failure analysis flow and highlight its significance in root-cause identification.

fault isolation, integrated circuits, laser voltage probing, root cause analysis, silicon on insulator
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Copyright © 2012 ASM International. All rights reserved.
2012
ASM International
Topics
Semiconductor wafer fabrication Root cause analysis
Issue Section:
2012 IPFA Best Paper
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