Development of an Automated TDR System for Package Failure Analysis

This paper describes the successful effort to develop the Time Domain Reflectometry (TDR) tool by automating the equipment process. The current challenges in the tool usage brought about by miniaturization in the package technology presented itself as an opportunity for the tool improvement. The authors were able to devise an automated TDR system which is ergonomically safe, yielded a significant through put time reduction and provide a consistent and accurate result. This comes at a lower cost in comparison to the current system available in the Virtual Factory (VF).