This paper outlines the analysis of a flash single bit failure caused by bitcell degradation over write/erase cycling. With no physical anomaly present at the failing single bit, Atomic Force Probing (AFP) characterization was utilized in conjunction with thermal response characterization to direct analysis towards a particular non-visible defect as the root cause. Existence of the hypothesized non-visible defect causing the single bit cycling failure was proven through Transmission Electron Microscopy (TEM) stained sample analysis, which highlighted an anomalous lateral drain junction formation at the single bit that caused the cycling failure.

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