In this paper, we describe a fault localization strategy for scan designs based on Time Resolved Photon Emission (TRE) and analog simulation. After characterizing the defect’s electrical footprint using TRE, analog fault simulation is applied. A user - friendly software package with an easy to use interface to scan diagnosis, layout tool and simulator was created.

analog simulation, electrical footprints, failure analysis, fault localization, time resolved photon emission
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Copyright © 2010 ASM International. All rights reserved.
2010
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Photon Based Techniques
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