Mobile Diffractive Solid Immersion Lens Design for Backside Laser Based Fault Localization

In this paper, a mobile Diffractive Solid Immersion Lens (mDSIL) design is proposed to enhance spatial resolution for backside laser fault isolation techniques. By allowing for multiple failure sites analysis using a single DSIL, this design improves conventional static DSIL directly fabricated on silicon substrate. The feasibility of mDSIL is demonstrated experimentally and the resolution performance is shown to be comparable to a static DSIL.