FIB column performance can be difficult to evaluate, and the traditional metrics of imaging resolution and minimum spot size give little indication of how a FIB system will perform its intended daily tasks. A series of supplemental FIB performance tests is proposed to quantify “milling acuity” under real-world conditions. A quantitative measuring scheme for evaluating the quality of High Aspect Ratio (HAR) vias is proposed, and an example is shown in which the HAR measuring scheme can be used for process development.

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