Spatial resolution limitations of IR thermal microscopy also limit the temperature accuracy for small thermal sources. Use of Raman temperature measurements significantly improves spatial resolution and thereby temperature accuracy. Previous, visible-wavelength, Raman temperature measurements are limited to top side measurements in silicon. This paper describes the first ever IR Raman measurements in silicon and demonstrates its use for backside temperature measurements.
This content is only available as a PDF.
Copyright © 2009 ASM International. All rights reserved.
Issue Section:Photon Based Techniques