A Laser Timing Probe (LTP) system which uses a noninvasive 1.3 µm continuous wave (CW) laser with frequency mapping and single point measurement capabilities is described. The frequency mapping modes facilitate the localization of signal maxima for subsequent single point measurements. Measurements of waveforms with long delays and 50 ps response time from NMOS and PMOS transistors are also shown.

continuous wave lasers, failure analysis, laser timing probe systems, NMOS transistors, PMOS transistors
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Copyright © 2009 ASM International. All rights reserved.
2009
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Advanced Techniques
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