This paper presents the use of pulsed laser stimulation with picosecond and femtosecond laser pulses. We first discuss the resolution improvement that can be expected when using ultrashort laser pulses. Two case studies are then presented to illustrate the possibilities of the pulsed laser photoelectric stimulation in picosecond single-photon and femtosecond two-photon modes.

failure analysis, femtosecond laser pulses, IC characterization, picosecond laser pulses, pulsed laser stimulation, ultrashort laser pulses
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Copyright © 2009 ASM International. All rights reserved.
2009
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Photon Based Techniques
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