Abstract

Development of a reliable mechanical decapsulation procedure for an IC process incorporating Cu and organic passivation layers resulted in a better understanding of the polishing process. The improved polishing technique --Deterministic Polishing-- is an adaptation of an advanced polishing technology employed by the optics industry to fabricate highly accurate optical elements. These results can be applied to a broad class of polishing applications.

copper, failure analysis, IC process, mechanical decapsulation, optics industry, passivation, polishing
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Copyright © 2009 ASM International. All rights reserved.
2009
ASM International
Topics
Lapping and polishing Copper
Issue Section:
Sample Preparation
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