3-D Image Reconstruction in the Scanning Electron Microscope Available to Purchase

This paper demonstrates that an SEM stereo-pair can be accurately translated into a Digital Elevation Model (DEM) using commercial software running on a desktop computer. The DEM is easy to view without any special equipment and can provide accurate measurements of the sample in all three dimensions. Vertical height measurements with high accuracy can be obtained from the elevation model when the sample has sufficient surface texture and a uniform baseline.