As electronic devices shrink further in the nanometer regime, electrical characterization using nanoprobing has become increasingly important. Focused ion beam (FIB) is one useful technique that can be used to create markings for ease of defective site identification during nanoprobing. This paper investigates the impact of FIB exposure on the electrical parameters of the pull-up (PU), pull-down (PD) and pass-gate (PG) transistors of 6-Transistor Static Random Access Memory (6T SRAM) cells.

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