We have employed electroluminescence (EL) analysis of an edge-emitting laser diode (LD) to detect possible defects. To extract EL emission from a LD, we developed a tilt polish technique of the bottom electrode. We can successfully observed clear EL emission. A high yield of 99.2 % was achieved by the introduction of the precise tilt polish technique.

electroluminescence analysis, failure analysis, laser diodes, tilt polish techniques
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Copyright © 2008 ASM International. All rights reserved.
2008
ASM International
Topics
Lapping and polishing
Issue Section:
Poster Session
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