We have employed electroluminescence (EL) analysis of an edge-emitting laser diode (LD) to detect possible defects. To extract EL emission from a LD, we developed a tilt polish technique of the bottom electrode. We can successfully observed clear EL emission. A high yield of 99.2 % was achieved by the introduction of the precise tilt polish technique.

This content is only available as a PDF.
You do not currently have access to this content.