Abstract
Circuit Edit (CE) through a conductor requires an insulator to isolate the connection transiting the conductor. We investigate several recipes to determine not just the optimum recipe but also the latitude to provide a means of throughput optimization for a given edit requirement. The results show that trade-offs in deposition rate, robustness and isolation quality can be made to enable this throughput optimization.
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Copyright © 2008 ASM International. All rights reserved.
2008
ASM International
Issue Section:
Circuit Edit
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