Abstract
The effect of Refractive Solid Immersion Lens (RSIL) parameters on the enhancement to laser induced fault localization techniques are investigated. The experimental results of the effect on a common laser induced technique, namely Thermally Induced Voltage Alteration (TIVA), and imaging are presented. A signal enhancement in the peak TIVA signal of close to 12 times has been achieved.
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2008
ASM International
Issue Section:
IPFA 07 Best Paper
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