Abstract

Blind deconvolution techniques were used to enhance scanning electron microscope (SEM) images in the range of 200,000x to 500,000x magnification. Typical SEM samples were imaged including a gold island reference standard, a plasma delayered integrated circuit, and an integrated circuit cross section. Image resolution improvement up to 40% was observed. However, it was necessary to use 16-bit TIFF images with greater than 120:1 signal to noise ratio, which required 10 minute frame times.

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