Blind Deconvolution of SEM Images

Blind deconvolution techniques were used to enhance scanning electron microscope (SEM) images in the range of 200,000x to 500,000x magnification. Typical SEM samples were imaged including a gold island reference standard, a plasma delayered integrated circuit, and an integrated circuit cross section. Image resolution improvement up to 40% was observed. However, it was necessary to use 16-bit TIFF images with greater than 120:1 signal to noise ratio, which required 10 minute frame times.