Challenges of Atomic Force Probe Characterization of Logic Based Embedded DRAM for On-Processor Applications

Nanoprobing logic based SOI embedded DRAM cells for on-processor designs poses different challenges than probing conventional six transistor SRAM designs. This paper will describe nanoprobing logic based embedded DRAM (eDRAM) cells in 65nm SOI applications. We will also describe probe placement and measurement methodology for electrical characterization of leakage between deep trench capacitors composing those eDRAM designs. The introduction of nano CV metrology and scanning capacitance imaging for use in characterizing DRAM capacitors will also be discussed.