This paper discusses the failure analysis process of a DC failure using an in-FIB (Focused Ion Beam) nanoprobing technique with four probes and a scanning capacitance microscope (SCM) in advanced DRAM devices. Current-Voltage (I-V) curves measured by the nanoprobing technique indicate the curve of the failed device is different from that of the normal device. The failed device causes a high leakage current in the test. The cross-sectional 2-D doping profile of SCM verifies the region of the P-Well has shifted to create a leakage path that causes this failure.

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