Abstract

Equipment manufacturers have developed peripherals for their tools that add soft defect localization (SDL) capability to existing optical beam tools, in many cases providing excellent results. However, these upgrades add significant cost to the tool. This paper presents the design considerations for a simple adapter that was developed in house to add SDL capability to optical beam induced resistance change (OBIRCH) tool, including resolution of some unexpected problems. This solution represents a simple, low cost method to add SDL testing capability to the OBIRCH tool and can also be used in conjunction with OBIC and XIVA tools with little or no modification. An early example of the SDL results provided by this adapter is also presented.

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