We perform the in-situ scanning transmission electron microscopy (STEM) study of current capacity of carbon nanofibers (CNFs) suspended between two electrodes in vacuum. At an average current density of 4×106 A/cm2, CNFs show breakdown due to current stress. Current-induced failure results in many voids between graphitic layers in CNF, indicating that the structure of CNFs strongly affects their failure mechanism due to high current stress. These findings provide the insight of the failure mode of future carbon-based interconnects.

carbon nanofibers, current density, failure analysis, scanning transmission electron microscopy, voids
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Copyright © 2006 ASM International. All rights reserved.
2006
ASM International
Topics
Scanning transmission electron microscopy Semiconductor wafer fabrication
Issue Section:
Nanotechnology and Nanoprobing
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