The common Passive Voltage Contrast (VC) localization method has its limits in the case of substrate contact chains. Because of leakage currents it is not possible to charge up the open part of the chain. In two case studies it is shown, how the Active Voltage Contrast (AVC) method in FIB and SEM can help to localize faults in such structures.

active voltage contrast, failure analysis, fault localization, focused ion beam, leakage current, passive voltage contrast, scanning electron microscope
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Copyright © 2006 ASM International. All rights reserved.
2006
ASM International
Topics
Scanning electron microscopy Semiconductor wafer fabrication
Issue Section:
Die Level Fault Isolation
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