With high implant doses, strained silicon technologies and shrinking feature sizes, dislocation related failures seem to gain more importance in advanced CMOS devices. On the basis of case studies, different types of dislocations as well as the electrical characteristics of the corresponding devices will be presented.

CMOS devices, dislocations, electrical characteristics, failure analysis, strained silicon
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Copyright © 2005 ASM International. All rights reserved.
2005
ASM International
Topics
Dislocations Semiconductor wafer fabrication Silicon
Issue Section:
Die Level Fault Isolation
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