Methodology of Optimum-kV BSE Application in SEM and Summary of Characteristic for Low Energy SEM/EDS/FIB

Advantages of low energy e-beam & i-beam in the operation and applications of SEM/FIB/EDS are presented. Further advantages of Backscattered Electron in SEM are stressed in the paper. However, since the “low energy” limit of zero is impractical, limiting factors and optimum operation conditions will be discussed. The article also investigates practical challenges associated with low energy beams in real situations.