Light Emission due to Off-State Leakage Current (LEOSLC) is used in combination with the Picosecond Imaging Circuit Analysis (PICA) method to effectively diagnose and localize defects in a broken scan chain. As usual, the emission base method shows to be very effective in debugging the problem; the defect is successfully identified by the optical technique and confirmed by Physical Failure Analysis (PFA).

debugging, failure analysis, leakage current, optical methods, picosecond imaging circuit analysis, scan chain, time-dependent emission measurements
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Copyright © 2004 ASM International. All rights reserved.
2004
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Test
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