Abstract

In this study we have investigated the magnetic field associated with a current flowing in a circuit using Magnetic Force Microscopy (MFM). The technique is able to identify the magnetic field associated with a current flow and has potential for failure analysis.

electronic circuits, failure analysis, magnetic force microscopy, semiconductor devices
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Copyright © 2004 ASM International. All rights reserved.
2004
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Scanning Probe Microscopy
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