Abstract
This article describes a novel way to prepare TEM samples from existing FIB lift out samples for third dimensional observation. An in situ needle in a FIB column is applied to handle the sample and a special sample holder is used that tilts the sample rapidly to 90º in the FIB column. The application of this technique is also discussed.
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Copyright © 2004 ASM International. All rights reserved.
2004
ASM International
Issue Section:
Sample Preparation
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