This paper will cover some of the options available to manage the failure analysis process when it is capacity constrained. This paper will provide a method to model a failure analysis operations capacity to aid in the decision process of where the constraints are. Several examples of solutions to some typical constraints will be presented also.

capacity management solutions, constraint analysis, failure analysis
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Copyright © 2004 ASM International. All rights reserved.
2004
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Failure Analysis Process
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