Advanced RF IC’s incorporate numerous components along with the CMOS circuitry. One component is a metal-insulatormetal (MIM) capacitor. Test capacitors have been stressed using accelerated voltage and temperature conditions to assess the long-term reliability. This paper describes a methodology for evaluating the MIM capacitors that have failed during reliability testing. IR microthermography was developed to detect leakage locations in areas that are not visible to optical inspection or standard emission microscopes. These areas were deprocessed to correlate the IR emission and physical defect locations. This information is utilized to understand the failures and improve the reliability.