Abstract

The success of circuit editing depends not only on x-y navigation to precise coordinates on the integrated circuits (IC), but also on precise z navigation. Certainly, secondary electron (SE) emission has proven to be the most accurate monitoring technique to accomplish this z precision. Even so, it has been amazing that SE monitoring works in high aspect ratio holes—reports have been made of high aspect ratio holes near 30:1. To explain why this occurs, therefore, is of interest and, by understanding how it works, we may improve the technique.

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