Next-Generation Optical Probing Tools for Design Debug of High Speed Integrated Circuits

Time-resolved photon emission (TRPE) results, obtained using a new superconducting, single-photon detector (SSPD) are reported. Detection efficiency (DE) for large area detectors has recently been improved by >100x without affecting SSPDs inherently low jitter (≈30 ps) and low dark-count rate (<30 s-1). TRPE measurements taken from a 0.13 μm geometry CMOS IC are presented. A single laser, time-differential probing scheme that is being investigated for next-generation laser voltage probing (LVP) is also discussed. This new scheme is designed to have shot-noise-limited performance, allowing signals as small as 100 parts-per-million (ppm) to be reliably measured.