The light emission from ever increasing OFF-state leakage currents in advanced CMOS technologies can now be reliably measured using existing photon detectors. The measurements of such an emission provide valuable information about the operation of ICs. In this paper we suggest and experimentally confirm two new techniques based on such measurements - Transient Logic State Detection and Power Supply Noise Analysis.

CMOS, failure analysis, integrated circuits, leakage currents, photon detectors, picosecond imaging circuit analysis, power supply noise analysis, transient logic state detection
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Copyright © 2002 ASM International. All rights reserved.
2002
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Die Level Fault Isolation
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