Abstract
A resistive probe based Scanning Thermal Microscope (SThM) was implemented in an analysis chamber of a Scanning Electron Microscope (SEM). By means of this hybrid-system thermal device, specific characteristics are detectable. Variable punctual heat sources can be simulated and the influence of ambient parameters can be investigated.
Copyright © 2002 ASM International. All rights reserved.
2002
ASM International
Issue Section:
IPFA Best Paper Award Winner
You do not currently have access to this content.