Abstract

The Digital Micromirror Device (DMD) is a spatial light modulation Micro-Optical Electro-Mechanical Systems (MOEMS) device used in tabletop projectors, televisions and cinema projection systems. This device creates high resolution, high quality images by deflecting/modulating light with microscopic mirrors. Failure analysis of these devices requires superstructure, package, optics, and substructure approaches. Particles within the active array of a DMD are often killer defects, but those are the subjects of an entire discussion of their own. This paper will show evidence of failures associated with: windows in the package lids, failures of the superstructure area, and failures within the substructure. Methods for removal of the mirrors, as well as other structures, will be covered in greater detail. We will conclude with examples of analysis areas in DMD devices that show how they differ from other types of devices.

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