Optical Micro-Electro-Mechanical Systems (Optical MEMS, or MOEMS) comprise a disruptive technology whose application to telecommunications networks is transforming the horizon for lightwave systems. The influences of materials systems, processing subtleties, and reliability requirements on design flexibility, functionality and commercialization of MOEMS are complex. A tight inter-dependent feedback loop between Component/ Subsystem/ System Design, Fabrication, Packaging, Manufacturing and Reliability is described as a strategy for building reliability into emerging MOEMS products while accelerating their development into commercial offerings.

building reliability, failure analysis, lightwave systems, optical micro-electro-mechanical systems, telecommunications networks
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Copyright © 2001 ASM International. All rights reserved.
2001
ASM International
Topics
Semiconductor wafer fabrication
Issue Section:
Micro Electromechanical Systems
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