Abstract

Results of experimental studies are presented which address a concern that gallium staining from FIB imaging during backside editing might degrade IR navigation as well as signal acquisition during probing of flip chips by such techniques as Picosecond Imaging Circuit Analysis (PICA) and Laser Voltage Probing (LVP). Although optical transparency does depend on gallium implantation dose, Ga staining is, however, not necessarily a limitation to the implementation of photon optical tools in the debug laboratory. Comparisons are made on the results from devices under the following conditions: with and without an anti-reflective (AR) coating, with and without XeF2 enhancement during FIB etching, and with confocal laser scanning microscope (CLSM) imaging and CCD-based IR microscope imaging.

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