Abstract
A technique for localisation of defects in periodic integrated circuit microscope images is described. It uses a fully automatic and fine tunable algorithm based on Fourier transform spatial filtering with a specially developed algorithm. Applicable to any digital failure analysis imaging tool, it produces fast, automatic results to speed up the FA localisation function.
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Copyright © 2001 ASM International. All rights reserved.
2001
ASM International
Issue Section:
Poster Session
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