Abstract
Single probe beam phase-sensitive detection has been applied to backside optical probing using an interferometer with a novel vibration cancellation scheme. Improved waveform quality and consistency, compared to amplitude-sensitive detection, has been successfully demonstrated on a number of CMOS microprocessors based on the 0.18 um logic process technology. The interferometric probing scheme will be described in detail and results will be presented.
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Copyright © 2000 ASM International. All rights reserved.
2000
ASM International
Issue Section:
Techniques
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