Abstract

Bond pad characterization is usually performed by mechanical cross-sectioning as well as pull and shear tests. However, since all these methods apply mechanical forces to the bond pad, artifacts may result. Focused Ion Beam (FIB) characterization is a mechanically stress-free characterization method, which allows more accurate conclusions regarding the intermetallic behaviour of the bonding area. Some new approaches presented here show how to improve the FIB characterization procedure and to combine it with classical characterization methods.

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