The use of an antireflection coating for backside semiconductor failure analysis is discussed. The process of selecting an appropriate coating is described. Several known coatings are also described in regards to imaging quality, material properties, and the benefits to device analysis applications.

antireflection coatings, failure analysis, semiconductor devices
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Copyright © 2000 ASM International. All rights reserved.
2000
ASM International
Topics
Coatings and coating materials Scanning electron microscopy Semiconductor wafer fabrication
Issue Section:
Backside
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