Scanning Electron Acoustic Microscopy: A Novel Tool for Failure Analysis and Microcharacterization

This paper describes Scanning Electron Acoustic Microscopy (SEAM) applications, particularly to samples that are of interest to the microelectronics industry. Several applications of SEAM involving semiconductor and ferroelectric samples are discussed in this paper. The expanding scope of applications for SEAM presents exciting possibilities. The challenge ahead lies in understanding the contrast mechanisms in SEAM signal formation as well as correlating results to the physical properties of samples.