High-Yield and High-Throughput TEM Sample Preparation Using Focused Ion Beam Automation Available to Purchase

Recent advances in the methods of preparing transmission electron microscope (TEM) samples using the focused ion beam (FIB) are presented. In particular, automation of TEM sample preparation is described. These automation methods, coupled with advances in ion column design, make it possible to prepare samples more efficiently and with less user involvement, thereby increasing FIB system utilization. Issues relating to sample handling and process-induced artifacts are also discussed.