We present a non-contact probing technique for measuring highfrequency voltage waveforms at the internal points of an operating integrated circuit. Internal circuit voltages are measured by sensing the local electrostatic force on a small micromachined probe that is held in close proximity to the circuit measurement point. The instrument currently has a 3GHz bandwidth and a capacitive loading on the test point of less than 1fF. The non-contact technique is capable of measuring signals on passivated interconnects

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