Abstract

Cross sectioning has proven over the years to be a failure analyst's most important tool for examining the depth-related features of a sample. This paper discusses a.sample block design that allows angled as well as normal (90 degree) sectioning without remounting the sample. This in turn allows for much faster cross sections, with time savings not only from avoiding remounting the sample, but also in the polishing process itself, particularly with silicon-on-sapphire dice.

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