Abstract

Conventional needle probecard techniques suffer from several problems: needles scratch the pads causing bonding problems, the maximum test speed is limited by the poor high frequency performance of the needle contacts. This contribution presents a new contactless method to inject test stimuli and to monitor the output. On chip photo diodes and simple receiver circuits transform light pulses to proper input signals, while a capacitively coupled probe with a very sensitive charge amplifier detects the output signal. The apparational overhead to conventional test system is small as well as the chip space required for photo diode and receiver circuit.

This content is only available as a PDF.
You do not currently have access to this content.