Contamination Diagnosis Using Contamination-Defect-Fault (CDF) Simulation

This paper describes a simulation-based approach to contamination diagnosis. The methodology is based on the contamination-defect fault (CDF) simulator CODEF. CODEF is able to derive circuit-level faults resulting from contamination deposited on an IC cell during fabrication by simulating the manufacturing process flow. The application of CODEF in contamination diagnosis is illustrated with several examples.