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ISTFA 2017

November 5–9, 2017

Pasadena, California, USA

Conference Sponsors:

ISTFA 2017: Conference Proceedings from the 43rd International Symposium for Testing and Failure Analysis

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ESREF Best Paper
IPFA Best Paper
3D Devices and Packages
System Level Analysis
Counterfeit Microelectronics
Advanced Methods and Techniques
Failure Analysis Process
Fault Isolation and Defect Localization
Circuit Edit
Sample Preparation and Deprocessing
Hardware Attacks and Reverse Engineering
Low Power Devices
Microscopy
Mixed Mode and High Power Devices
Nanoprobing
Packaging and Assembly Analysis
Product Yield, Test, and Diagnostics
Sample Preparation and Deprocessing
Scanning Probe Analysis
Failure Analysis for Space Applications
Volume Information

ISTFA 2017: Conference Proceedings from the 43rd International Symposium for Testing and Failure Analysis

ESREF Best Paper

Single Event Transient Acquisition and Mapping for Space Device Characterization

Roberta Pilia; Guillaume Bascoul; Kevin Sanchez; Giovanna Mura; Fulvio Infante

ISTFA 2017; 1-7doi:https://doi.org/10.31399/asm.cp.istfa2017p0001

IPFA Best Paper

A Detailed Analysis Scheme to Interpret Multiple Photon Emissions Micrograph for Improved Diagnostic Resolution on Open Defects

S.H. Goh; Edmund C Manlangit; Edy Susanto; B.L. Yeoh; Hu Hao; Alan Tan; Hnin Hnin W Ma; Zhao Lin; Y.H. Chan; Jeffrey Lam

ISTFA 2017; 8-13doi:https://doi.org/10.31399/asm.cp.istfa2017p0008

3D Devices and Packages

Making Synchrotron Tomography a Routine Tool for 3D Integration Failure Analysis through a Limited Number of Projections, an Adapted Sample Preparation Scheme, and a Fully-Automated Post-Processing

A. Fraczkiewicz; S. Moreau; T. Mourier; P. Bleuet; P.-O. Autran; E. Capria; P. Cloetens; J. Da Silva; S. Lhostis; F. Lorut

ISTFA 2017; 14-18doi:https://doi.org/10.31399/asm.cp.istfa2017p0014

3D Localization of Liner Breakdown’s within Cu Filled TSVs by Backside LIT and PEM Defocusing Series

Frank Altmann; Christian Grosse; Ingrid de Wolf; Sebastian Brand

ISTFA 2017; 19-24doi:https://doi.org/10.31399/asm.cp.istfa2017p0019

Application of Electro Optical Terahertz Pulse Reflectometry for Fault Localization and Defect Analysis

Yi-Sheng Lin; Yu-Hsiang Hsiao; Shu-Hua Lee

ISTFA 2017; 25-35doi:https://doi.org/10.31399/asm.cp.istfa2017p0025

Non-Destructive Fault Localization in 2.5D Packages Using Electro Optical Terahertz Pulse Reflectometry

B. Zee; W. Qiu; J. Alton; T. White; M. Igarashi

ISTFA 2017; 36-39doi:https://doi.org/10.31399/asm.cp.istfa2017p0036

Study on Development Behavior and Mechanism of Delamination by NCF Material under uHAST Test Condition

Ju Young Kim; Hyoung-Ryeun Kim; Dong Woo Hahn; Sung Min Hwang

ISTFA 2017; 40-42doi:https://doi.org/10.31399/asm.cp.istfa2017p0040

A Study on the Cause and Improvement Method of Aluminum PAD Disappearance Defect in TSV Package Process

Boem-Su Kim; Su Hyeon Park; Hyoung Ryeun Kim; Sung Min Hwang

ISTFA 2017; 43-45doi:https://doi.org/10.31399/asm.cp.istfa2017p0043

Temperature-Dependent Die Warpage Measurements Up to 400°C

Tobias Mittereder; Bernhard Ferstl; Terry Heidmann; Christian Hollerith

ISTFA 2017; 46-49doi:https://doi.org/10.31399/asm.cp.istfa2017p0046

System Level Analysis

Fault Isolation of Leakage for a Device with Nonuniform Epoxy Encapsulation

Ke-Ying Lin; Hsiu-Li Ssang; Shou-Ming Huang

ISTFA 2017; 50-53doi:https://doi.org/10.31399/asm.cp.istfa2017p0050

Case Study—Lock-in Thermography Application in Failure Analysis of a System Level DC-DC μModule Regulator

Vikash Kumar; Devraj Karthikeyan

ISTFA 2017; 54-58doi:https://doi.org/10.31399/asm.cp.istfa2017p0054

Case Study of Physical Failure Analysis Method for Microcrack Detection in Laser Via of Printed Circuit Boards

Hyunsoo Kim; Jaehyeong Woo; Dongju Lim; Youngje Kim; Munmo Jeong

ISTFA 2017; 59-66doi:https://doi.org/10.31399/asm.cp.istfa2017p0059

Challenges of System Level Failure Analysis of Electronics in the Automotive Industry

Bence Hevesi

ISTFA 2017; 67-72doi:https://doi.org/10.31399/asm.cp.istfa2017p0067

Counterfeit Microelectronics

Power Spectrum Analysis

Paiboon Tangyunyong; Edward I. Cole, Jr.; Guillermo M. Loubriel; Joshua Beutler; Darlene M. Udoni; Biliana S. Paskaleva; Thomas E. Buchheit

ISTFA 2017; 73-78doi:https://doi.org/10.31399/asm.cp.istfa2017p0073

Battelle Barricade—Microelectronic Device Authentication and Counterfeit Detection Utilizing Power Analysis

Katie Liszewski; Thomas Bergman

ISTFA 2017; 79-87doi:https://doi.org/10.31399/asm.cp.istfa2017p0079

Advanced Methods and Techniques

Scanning Surface Photovoltage Microscopy for Stress Analysis in Nanoscale CMOS Devices

Daminda Dahanayaka; Phil Kaszuba; Leon Moszkowicz; Randall Wells; James Slinkman; Lloyd A. Bumm

ISTFA 2017; 88-94doi:https://doi.org/10.31399/asm.cp.istfa2017p0088

Acoustic and Photoacoustic Inspection of Through-Silicon Vias in the GHz-Frequency Band

Sebastian Brand; Michael Kögel; Frank Altmann; Ingrid DeWolf; Ahmad Khaled; Michael J. Moore; Michael C. Kolios; Eric M. Strohm

ISTFA 2017; 95-102doi:https://doi.org/10.31399/asm.cp.istfa2017p0095

Device Channel Temperature Measurement Using NIR Emission

Alan J. Weger; Franco Stellari; Peilin Song

ISTFA 2017; 103-108doi:https://doi.org/10.31399/asm.cp.istfa2017p0103

Optical Investigations of Temperature Effects in 14/16 nm FinFETs

Ivo Vogt; Christian Boit; Tomonori Nakamura; Babak Motamedi

ISTFA 2017; 109-116doi:https://doi.org/10.31399/asm.cp.istfa2017p0109

Open Failure Localization by Using MOFM—Magneto-Optical Frequency Mapping System with 532 nm Light Source

Tomonori Nakamura; Akihiro Otaka

ISTFA 2017; 117-122doi:https://doi.org/10.31399/asm.cp.istfa2017p0117

Failure Analysis Process

Impact of Carbon on Threshold Voltage Shift in MOSFET Studied by 3D Atom Probe Tomography

Ju-Heon Kim; Euna Ok; Hyunmi Sim; Dongkeun Na; Ho Seok Song; Dae Hyun kim; Yong-Beom Cho; Seok-Jun Won; Tae-Soo Park

ISTFA 2017; 123-127doi:https://doi.org/10.31399/asm.cp.istfa2017p0123

Failure Analysis of Variable Resistor

Yasunobu Iwai; Yasuo Imai

ISTFA 2017; 128-130doi:https://doi.org/10.31399/asm.cp.istfa2017p0128

Charge-Induced Damage on SOI Wafers—A Case Study

Mary A. Miller; Darlene M. Udoni

ISTFA 2017; 131-134doi:https://doi.org/10.31399/asm.cp.istfa2017p0131

Fast Root Cause Identification Using Combination of Failure Analysis and In-Line Inspection

Zhigang Song; Weihao Weng; Brett Engel

ISTFA 2017; 135-139doi:https://doi.org/10.31399/asm.cp.istfa2017p0135

SRAM PFET and NFET Super FIN Characterization

Yong Wei; Frieder Baumann; Stephen Lucarini; Karl Barth; Zhigang Song; Ahmad Katnani

ISTFA 2017; 140-142doi:https://doi.org/10.31399/asm.cp.istfa2017p0140

Conductive-AFM for Failure Analysis of Parametric Test Structures in Advanced Technology Development

Chuan Zhang; Esther P.Y. Chen

ISTFA 2017; 143-147doi:https://doi.org/10.31399/asm.cp.istfa2017p0143

Overcoming the Challenges on Electrically Damaged Devices

Allan Norico; Andrew Sabate

ISTFA 2017; 148-154doi:https://doi.org/10.31399/asm.cp.istfa2017p0148

A Review of Well Imaging Techniques

Gregory M. Johnson; Jochonia Nxumalo; Christopher D’Aleo; Brian Yates; Zaheer Khan; Christopher Mollela

ISTFA 2017; 155-159doi:https://doi.org/10.31399/asm.cp.istfa2017p0155

A Case Study of Trapped Charge Induced Surface Leakage

Xiang-Dong Wang; Xu Cheng; Evgueniy Stefanov; William Godek

ISTFA 2017; 160-163doi:https://doi.org/10.31399/asm.cp.istfa2017p0160

Failure Analysis and Process Verification of High-Density Copper ICs Used in Multichip Modules

Jeremy A. Walraven; Mark W. Jenkins; Tuyet N. Simmons; James E. Levy; Sara E. Jensen; Adam Jones; Eric E. Edwards; James A. Bartz; Edward I. Cole, Jr.; Lovelace Soirez; John Norbert

ISTFA 2017; 164-170doi:https://doi.org/10.31399/asm.cp.istfa2017p0164

Debugging Signal Corruption in Scan Chain Using Phase Laser Voltage Imaging

G. Ranganathan; V.K. Ravikumar; S.L. Phoa; C. Nemirow; N. Leslie

ISTFA 2017; 171-175doi:https://doi.org/10.31399/asm.cp.istfa2017p0171

Fault Isolation and Defect Localization

Fault Localization by Finding Schematic of Devices Connecting All Emission Sites in Photon Emission Microscope Image

Ankush Oberai; Jiann-Shiun Yuan

ISTFA 2017; 176-179doi:https://doi.org/10.31399/asm.cp.istfa2017p0176

Acceptable Laser Dose of 28 nm FDSOI Technology—Correlation of Experiment and Simulation

Maxime Penzes; Sylvain Dudit; Thierry Parrassin; Dean Lewis; Philippe Perdu

ISTFA 2017; 180-183doi:https://doi.org/10.31399/asm.cp.istfa2017p0180

Characterization of Dynamic Laser Stimulation Approach to Locate Memory Fails Using EeLADA

S.H. Goh; B.L. Yeoh; Y.T. Ngow; Hu Hao; Alan Tan; Y.H. Chan; Lin Zhao; Jeffrey Lam; C.C. Tay

ISTFA 2017; 184-190doi:https://doi.org/10.31399/asm.cp.istfa2017p0184

Ultra-Low Frequency Laser Voltage Imaging of Mixed-Signal Designs

Tobias Schmidutz; Charlotte Hoyler; Zhongling Qian; Christof Brillert; Christian Burmer

ISTFA 2017; 191-195doi:https://doi.org/10.31399/asm.cp.istfa2017p0191

Time Resolved LADA Using a Modulated Pulsed Laser to Fault Isolate Bridging Defects and Framing High Accuracy Physical FA Plan in 14 nm FinFET Technologies

Gaurav Mattey; Lava Ranganathan

ISTFA 2017; 196-200doi:https://doi.org/10.31399/asm.cp.istfa2017p0196

The Effects of Using 785 nm for Laser Probing

Neel Leslie; Christopher Nemirow

ISTFA 2017; 201-206doi:https://doi.org/10.31399/asm.cp.istfa2017p0201

Electro-Optical Frequency Mapping Phase Image Simulation Technique for Failure Analysis

Junpei Nonaka; Nakaba Matsui; Seiichi Honbu; Kazuki Shigeta; Yukihisa Funatsu

ISTFA 2017; 207-213doi:https://doi.org/10.31399/asm.cp.istfa2017p0207

Laser Silicon Interaction Study on Ring Oscillators to Establish Temperature Voltage Dependency Trends on 14 nm and Future FinFET Technologies

Gaurav Mattey; Lava Ranganathan

ISTFA 2017; 214-220doi:https://doi.org/10.31399/asm.cp.istfa2017p0214

Laser Voltage Tracing for Electrical Fault Isolation of Circuits Propagating Aperiodic Signals

V.K. Ravikumar; G. Ranganathan; S.L. Phoa; K.L. Pey; C. Nemirow; N. Leslie

ISTFA 2017; 221-227doi:https://doi.org/10.31399/asm.cp.istfa2017p0221

Picosecond Time-Resolved LADA Integrated with a Solid Immersion Lens on a Laser Scanning Microscope

Kris Dickson; Kent Erington; Dan Bodoh; Keith Serrels; Charles Petri; Juan Ybarra; Khiem Ly

ISTFA 2017; 228-237doi:https://doi.org/10.31399/asm.cp.istfa2017p0228

Circuit Edit

Exploring the Physical Limits of Gallium-Based Focused Ion Beam Chip Circuit Editing

Steven B. Herschbein; Carmelo F. Scrudato; Edward S. Hermann; Raymond L. Wagner

ISTFA 2017; 238-245doi:https://doi.org/10.31399/asm.cp.istfa2017p0238

A Quantitative Method for Measuring Remaining Silicon Thickness during XeF₂ FIB Trenching for Backside Circuit Operations

G.P. Salazar; R.J. Shul; S.N. Ball; M.J. Rye; B.S. Phillips; M. DiBattista; S. Silverman

ISTFA 2017; 246-250doi:https://doi.org/10.31399/asm.cp.istfa2017p0246

Further Inquiry into Xe Primary Ion Species for Circuit Edit Application

Valery Ray; Ali Hadjikhani; Joseph Favata; Seyedeh Ahmadi; Sina Shahbazmohamadi

ISTFA 2017; 251-255doi:https://doi.org/10.31399/asm.cp.istfa2017p0251

Sample Preparation and Deprocessing

In-Situ Carbon Deposition in FIB for Reducing TEM Lamella Curtains Caused by Air Gaps in NAND Flash Memory

Hsin-Cheng Hsu; Chun-Hung Lin; Huai-San Ku; Dun-Fan Zhuang; Ru-Hui Lin; Yi-An Chen; Wei-Ming Hsiao; Chin-Chih Yeh; N.-T. Lian; Ta-Hone Yang; K.-C Chen

ISTFA 2017; 256-259doi:https://doi.org/10.31399/asm.cp.istfa2017p0256

Ion Milling of Ex-Situ Lift-Out FIB Specimens

M.J. Campin; C.S. Bonifacio; M. Boccabella; P.E. Fischione; H.H. Kang

ISTFA 2017; 260-264doi:https://doi.org/10.31399/asm.cp.istfa2017p0260

Practicality of Single Microscope Failure Analysis for Fault Isolation, Analysis, and Advanced TEM Sample Preparation by the Integration EBAC and EDS on FIBSEM

John Lindsay; James Sagar; James Holland; Jenny Goulden

ISTFA 2017; 265-269doi:https://doi.org/10.31399/asm.cp.istfa2017p0265

Increasing FA Throughput in Challenging Samples Utilizing TRUE X-Sectioning and the Rocking Stage

Marek Šikula; Tomáš Hrnčíř; Pascal Gounet

ISTFA 2017; 270-274doi:https://doi.org/10.31399/asm.cp.istfa2017p0270

Optimizing Ex-Situ Lift Out for Frontside or Backside FIB Milling

Lucille A. Giannuzzi

ISTFA 2017; 275-278doi:https://doi.org/10.31399/asm.cp.istfa2017p0275

Application of Laser Deprocessing Techniques to Improve the Job Efficiency and Throughput on Logic Device

H.H. Yap; J. Yu; D. Nedeau; Lucile C. Teague Sheridan; C.K. Oh

ISTFA 2017; 550-555doi:https://doi.org/10.31399/asm.cp.istfa2017p0550

Pico-Second Laser and Broad Argon Beam Tools for Characterization of Advanced Packaged Devices

Y. Wang; C. Spence; S. Coyle; J. Hunt; M. Hassel Shearer

ISTFA 2017; 556-558doi:https://doi.org/10.31399/asm.cp.istfa2017p0556

Novel IC Device Repackaging for SIL and Backside Analysis Capability

Leandro Muela; Raj Kabadi; Eric Barbian

ISTFA 2017; 559-566doi:https://doi.org/10.31399/asm.cp.istfa2017p0559

Halogen-Free Microwave Induced Plasma Decapsulation of System in Package Modules

J. Tang; J. Wang; St.J. Dixon-Warren; C.I.M. Beenakker

ISTFA 2017; 567-573doi:https://doi.org/10.31399/asm.cp.istfa2017p0567

Precision Xe Plasma FIB Delayering for Physical Failure Analysis of Sub-20 nm Microprocessor Devices

D. Zudhistira; V. Viswanathan; V. Narang; J.M. Chin; S. Sharang; K. Novotny; J. Vincen Oboňa

ISTFA 2017; 574-579doi:https://doi.org/10.31399/asm.cp.istfa2017p0574

Sample Preparation Techniques for Reduced Lateral Heat Distribution and Implications for Non-IR Probing on Integrated Circuits

Matthew M. Mulholland; Vladimir V. Vlasyuk; Robert P. Wadell; Imran Khan; Nathan J. Bakken

ISTFA 2017; 580-584doi:https://doi.org/10.31399/asm.cp.istfa2017p0580

Techniques in Extracting CSP Device from Underfilled PCB Module and Performing Solder Rework and Reballing for ATE Testing

Kah Chin Cheong

ISTFA 2017; 585-591doi:https://doi.org/10.31399/asm.cp.istfa2017p0585

Advanced Tools and Techniques for Delayering and Cross-Sectioning Semiconductor Devices

P. Nowakowski; M.L. Ray; P.E. Fischione

ISTFA 2017; 592-596doi:https://doi.org/10.31399/asm.cp.istfa2017p0592

Uncover Buried Hidden Defects through Fast Selective Chemical Etching and Mechanical Polish

Hui Peng Ng; Angela Teo; Ghim Boon Ang; Chang Qing Chen; Yong Seng Tam; Naiyun Xu; Dayanand Nagalingam; Zhi Hong Mai; Jeffrey Lam

ISTFA 2017; 597-601doi:https://doi.org/10.31399/asm.cp.istfa2017p0597

Hardware Attacks and Reverse Engineering

Backside Protection Structure for Security Sensitive ICs

Elham Amini; Ruslan Muydinov; Bernd Szyszka; Christian Boit

ISTFA 2017; 279-284doi:https://doi.org/10.31399/asm.cp.istfa2017p0279

Steps Toward Automated Deprocessing of Integrated Circuits

E.L. Principe; Navid Asadizanjani; Domenic Forte; Mark Tehranipoor; Robert Chivas; Michael DiBattista; Scott Silverman; Mike Marsh; Nicolas Piche; John Mastovich

ISTFA 2017; 285-298doi:https://doi.org/10.31399/asm.cp.istfa2017p0285

Fast and Robust Topology-Based Logic Gate Identification for Automated IC Reverse Engineering

Roger Durà; Jofre Pallarès; Raúl Quijada; Xavier Formatjé; Salvador Hidalgo; Francisco Serra-Graells

ISTFA 2017; 299-302doi:https://doi.org/10.31399/asm.cp.istfa2017p0299

Low Power Devices

Case Study of a DDR Loopback Test Failure Encountered on a Map Ball Grid Array Packaged Device

Jose Z. Garcia, III; Kris Dickson

ISTFA 2017; 303-308doi:https://doi.org/10.31399/asm.cp.istfa2017p0303

Automated Schematic Transformation to Enhance Circuit Failure Design Debug

Varun Gupta; Wee Yee Wendy Lau; S.H. Goh; H.W. Ho; B.L. Yeoh; Hu Hao; Khalid Dawood; Jeffrey Lam

ISTFA 2017; 309-316doi:https://doi.org/10.31399/asm.cp.istfa2017p0309

Root Cause Analysis and Correction of Single Metal Contact Open-Induced Scan Chain Failure in 90 nm Node VLSI

Chao-Cheng Ting; Ya-Chi Liu; Hsuan-Hsien Chen; Chung-Ching Tsai; Liwen Shih

ISTFA 2017; 317-321doi:https://doi.org/10.31399/asm.cp.istfa2017p0317

Zynq SOC Low-Voltage and Temperature-Dependent L2 Cache Failure Diagnosis and Defect Localization Case Study

Haonan Bai; Lan Yin Lee; Yang Jing; Peter Floyd Salinas; Kok Keng Chua

ISTFA 2017; 322-326doi:https://doi.org/10.31399/asm.cp.istfa2017p0322

Application of Conductive-AFM in Soft Failure Analysis

Chuan Zhang; Yinzhe Ma; Gregory Dabney; Oh Chong Khiam; Esther P.Y. Chen

ISTFA 2017; 327-330doi:https://doi.org/10.31399/asm.cp.istfa2017p0327

Process Flow Employed for Parametric Test Structure Shorts Fault Isolation in 20 nm and Sub-20 nm Technologies in High Throughput Foundries

Satish Kodali; Mia Nasimullah; Yuting Wei; Chong Khiam Oh; Felix Beaudoin

ISTFA 2017; 331-335doi:https://doi.org/10.31399/asm.cp.istfa2017p0331

EBAC for Isolating Partially-Localized FEOL Electrical Shorts on Test Structures during Sub-14 nm Technology Development

John Masnik; Noor Jehan Saujauddin; Kevin Davidson; Esther P.Y. Chen; Felix Beaudoin

ISTFA 2017; 336-341doi:https://doi.org/10.31399/asm.cp.istfa2017p0336

Microscopy

Quantitative FIB-SEM 3D Tomography for Failure Analysis in Data Storage Industry

Zhi-Peng Li; Jianxin Fang; Haifeng Wang

ISTFA 2017; 342-344doi:https://doi.org/10.31399/asm.cp.istfa2017p0342

Maximizing the Electron Microscopy Contrasts for Analysis

Suey Li Toh; Rong Ji

ISTFA 2017; 345-348doi:https://doi.org/10.31399/asm.cp.istfa2017p0345

Failure Analysis and Defect Inspection of Electronic Devices by High-Resolution Cathodoluminescence

C. Monachon; M.S. Zielinski; D. Gachet; S. Sonderegger; S. Muckenhirn; J. Berney; D. Poppitz; A. Graff; S. Breuer; L. Kirste

ISTFA 2017; 349-352doi:https://doi.org/10.31399/asm.cp.istfa2017p0349

Electrical Characterization and Failure Analysis Using Operando TEM

Yevheniy Pivak; H.H. Perez-Garza; Alexander Zintler; Leopoldo Molina-Luna

ISTFA 2017; 353-357doi:https://doi.org/10.31399/asm.cp.istfa2017p0353

Transmission Electron Microscopy Nano Beam Diffraction Sensitivity Study in Focused Ion Beam Prepared Semiconductor Test Structures

James Demarest

ISTFA 2017; 358-361doi:https://doi.org/10.31399/asm.cp.istfa2017p0358

High Throughput Phase Mapping for Metrology Using Low-Loss EELS

Lianfeng Fu; Lifan Chen; Haifeng Wang

ISTFA 2017; 362-365doi:https://doi.org/10.31399/asm.cp.istfa2017p0362

EBIC and EBAC Analysis of Site Specific STEM Samples

C.T. Schamp; Y. Suzuki; J. Fuse; K. Ito; H. Tanaka; A. Kageyama; Y. Nagakubo; T. Mizuno

ISTFA 2017; 366-370doi:https://doi.org/10.31399/asm.cp.istfa2017p0366

Investigation of Switching Mechanism in HfO₂-Based Oxide Resistive Memories by In-Situ Transmission Electron Microscopy and Electron Energy Loss Spectroscopy

T. Dewolf; D. Cooper; N. Bernier; V. Delaye; A. Grenier; H. Grampeix; C. Charpin; F. Nardelli; S. Pauliac; S. Bernasconi; E. Jalaguier; G. Audoit; S. Schamm-Chardon

ISTFA 2017; 371-374doi:https://doi.org/10.31399/asm.cp.istfa2017p0371

Automated End-Point Detection and Targeted Ar⁺ Milling of Advanced Integrated Circuit FIB TEM Specimens

C.S. Bonifacio; P. Nowakowski; M.J. Campin; J.T. Harbaugh; M. Boccabella; P.E. Fischione

ISTFA 2017; 375-379doi:https://doi.org/10.31399/asm.cp.istfa2017p0375

In-Line Electron Beam Inspection of High Aspect-Ratio RMG FINFET Gate

Richard F. Hafer; Oliver D. Patterson; Cathy Gow; Derek McKindles; Brian Yueh-Ling Hsieh; Xiaohu Tang

ISTFA 2017; 380-385doi:https://doi.org/10.31399/asm.cp.istfa2017p0380

Automation to Enable Energy Dispersive X-ray Spectroscopy for High Throughput Failure Analysis and Metrology

Justin Roller; Zhenxin Zhong; Michael Strauss; Oleksii Bidiuk; Jeff Blackwood; Martin Verheijen; Ozan Ugurlu; Jason Donald

ISTFA 2017; 386-389doi:https://doi.org/10.31399/asm.cp.istfa2017p0386

Mixed Mode and High Power Devices

Practical Dynamic Laser Stimulation Techniques for Complex Analog and Mixed Signal IC Failure Analysis

Jeffrey Javier; Taylor Hurdle; Sammie Fernandez; Kari Van Vliet

ISTFA 2017; 390-397doi:https://doi.org/10.31399/asm.cp.istfa2017p0390

Power MOSFET Failure Analysis and Package Effects in 3-Phase, Half-Bridge Applications and Design Improvements

Mark Dipsey; Ian Kearney

ISTFA 2017; 398-402doi:https://doi.org/10.31399/asm.cp.istfa2017p0398

Using Electrical Fault Isolation and Characterization to Improve the Effectiveness of Physical Fault Isolation Techniques for Analog Circuits

Jim Douglass; Sohrab Pourmand

ISTFA 2017; 403-406doi:https://doi.org/10.31399/asm.cp.istfa2017p0403

A Novel Method/Model for Fault Localization of a Subtle Open on a Large Thin-Film Resistor, Using Photon Emission Microscopy Technique and Electric Field Mechanism

Vikash Kumar; Marian Udrea-Spenea

ISTFA 2017; 407-410doi:https://doi.org/10.31399/asm.cp.istfa2017p0407

Design for Failure Analysis in a 24 GHz Low-Noise Amplifier for Short Range Radar Applications Created in Silicon CMOS Technology

Philipp Scholz; Soenke Vehring; Uwe Kerst; Dirk Berger; Christian Boit; Georg Boeck; Friedel Gerfers

ISTFA 2017; 411-415doi:https://doi.org/10.31399/asm.cp.istfa2017p0411

Magnetic Head Shorting Failure Analysis

Liang Hong; Jia Li; Haifeng Wang

ISTFA 2017; 416-418doi:https://doi.org/10.31399/asm.cp.istfa2017p0416

Trends in Discrete Power MOSFET and Power System In-Package Fault Isolation

Ian Kearney; Mark Dipsey

ISTFA 2017; 419-423doi:https://doi.org/10.31399/asm.cp.istfa2017p0419

Nanoprobing

A Study on Error Corrected Code Failure-Induced Latent Defect in between High-k MIM Capacitors

Jinseon Kim; Minsoo Kim; Minju Shin; Incheol Nam; Daesun Kim; Hongsun Hwang; Sangjae Rhee; Kangyong Cho; Seongjin Jang

ISTFA 2017; 424-426doi:https://doi.org/10.31399/asm.cp.istfa2017p0424

Application of AFP Nanoprobing Light-Induced Photovoltaic Current in the Failure Analysis

C.Q. Chen; P.T. Ng; G.B. Ang; Francis Rivai; S.L. Ting; Angela Teo; H.P. Ng; J. Lam; Z.H. Mai

ISTFA 2017; 427-431doi:https://doi.org/10.31399/asm.cp.istfa2017p0427

Resolve of OTP Failures through Electrical Simulation Using AFP Nanoprobing in Wafer Fabrication

Ghim Boon Ang; Changqing Chen; Hui Peng Ng; Peng Tiong Ng; Alfred Quah; Angela Teo; Yong Seng Tam; Zhihong Mai; Jeffrey Lam

ISTFA 2017; 432-436doi:https://doi.org/10.31399/asm.cp.istfa2017p0432

To Reveal Invisible Doping Defect by Nanoprobing Analysis, Scanning Capacitance Microscopy, and Simulation

LiLung Lai; Li Yang; Chunhui Wang; Yong Wu

ISTFA 2017; 437-445doi:https://doi.org/10.31399/asm.cp.istfa2017p0437

High Resolution Localization Using Lock-in Based Electron Beam Methods

Felix Rolf; Christian Hollerith; Christian Feuerbaum

ISTFA 2017; 446-450doi:https://doi.org/10.31399/asm.cp.istfa2017p0446

Characterization of Gate Oxide Pinhole Defect in NMOS FinFET Devices

Liangshan Chen; Arnaud Bousquet; Tanya Schaeffer; Lucile C. Teague Sheridan; Lowell Hodgkins; Bianzhu Fu; Chongkhiam Oh

ISTFA 2017; 451-455doi:https://doi.org/10.31399/asm.cp.istfa2017p0451

Combining Electron Beam Methods, EBIC and EBAC, with Traditional Approaches for Highly Effective Fault Isolation

Ryan Fredrickson; Tim Kuebrich; Andrew Le; Derek Snider; Lucas Winiarski

ISTFA 2017; 456-463doi:https://doi.org/10.31399/asm.cp.istfa2017p0456

Nanoprobing Beyond 14 nm with Latest Generation SEM-Based Nanoprobers

Noor Jehan Saujauddin; Esther P.Y. Chen; Felix Beaudoin

ISTFA 2017; 464-468doi:https://doi.org/10.31399/asm.cp.istfa2017p0464

Nanoprobing-Based EBAC Technique from Backside as Well as Frontside to Isolate Logic Fails for Otherwise Non Visual Defects

Sreenath Arva; Satish Kodali; Lucile Sheridan; Karthik Kalaiazhagan; Chong Khiam Oh

ISTFA 2017; 469-472doi:https://doi.org/10.31399/asm.cp.istfa2017p0469

Fin Level Defect Isolation Inside a FinFET Using Electron Beam Alteration of Current Flow

H.J. Ryu; A.B. Shah; Y. Wang; W.-H. Chuang; T. Tong

ISTFA 2017; 473-475doi:https://doi.org/10.31399/asm.cp.istfa2017p0473

EBIC on TEM Lamellae for Improved Failure Localization and Root Cause Understanding

Frédéric Lorut; Romain Bon; Céline Borowiak; Philippe Larré

ISTFA 2017; 476-480doi:https://doi.org/10.31399/asm.cp.istfa2017p0476

Packaging and Assembly Analysis

High-Resolution Ultrasonic Inspection Images of Semiconductor Packages by Advanced High-Frequency Transducers

Koutaro Kikukawa; Kenta Sumikawa; Takuya Takahashi; Shigeru Ohno

ISTFA 2017; 481-484doi:https://doi.org/10.31399/asm.cp.istfa2017p0481

Advanced In Situ X-ray Metrology for Thermal Interface Materials Package Failure Analysis

Peng Li; Alfred La Mar; Yongmei Liu; Deepak Goyal

ISTFA 2017; 485-488doi:https://doi.org/10.31399/asm.cp.istfa2017p0485

Use of 3D X-Ray Microscopy for BEOL and Advanced Packaging Failure Analysis

Christian Schmidt; Stephen T. Kelly; Ingrid De Wolf

ISTFA 2017; 489-494doi:https://doi.org/10.31399/asm.cp.istfa2017p0489

Magnetic Field Imaging on Stacked Flash Memories by Laser Probing and SQUID Scanning

K. Sanchez; G. Bascoul; F. Infante; N. Courjault; T. Nakamura

ISTFA 2017; 495-500doi:https://doi.org/10.31399/asm.cp.istfa2017p0495

Influence of Sample Preparation on Intrinsic Stress Inside a Model Chip—Comparison of Results from Electric Read-Out and Raman Spectroscopy

T. Schaffus; H. Pfaff; P. Albert; M. Schaffus; F. Kroninger; J. Krumschmidt; D. Debie; W. Breuer; W. Mack

ISTFA 2017; 501-507doi:https://doi.org/10.31399/asm.cp.istfa2017p0501

New Insight into Interconnect Defect Analysis for DRAM

Youngil Kim; Hyungchae Jeon; Jaeguen Chung; Donggyun Yoo; Seonmi Kim; Incheol Nam; Chijong Baek; Jahyun Koo; Hongsun Hwang; Sangjae Rhee; Kangyong Cho; Seongjin Jang

ISTFA 2017; 508-510doi:https://doi.org/10.31399/asm.cp.istfa2017p0508

Product Yield, Test, and Diagnostics

Targeted Memory Test for Enhanced Diagnostic Fault Localization

Laura Safran; Christopher Hodge; John Sylvestri

ISTFA 2017; 511-519doi:https://doi.org/10.31399/asm.cp.istfa2017p0511

Combining Volume Scan Diagnosis and Dynamic Failure Analysis for Precise Isolation of Manufacturing Defects

A.M. Jakati; R. Deshpande; K.A. Serrels; P. Babighian; G. Dabney; A. Kalarikkal

ISTFA 2017; 520-525doi:https://doi.org/10.31399/asm.cp.istfa2017p0520

ATPG Testing and Diagnosis Implementation in Failure Analysis for a Fast and Efficient Iterative ATPG Diagnosis and Fault Isolation

Eric Barbian; Rommel Estores

ISTFA 2017; 526-537doi:https://doi.org/10.31399/asm.cp.istfa2017p0526

An Advanced Diagnosis Flow for SRAMs

Tien-Phu Ho; Eric Faehn; Arnaud Virazel; Alberto Bosio; Patrick Girard

ISTFA 2017; 538-543doi:https://doi.org/10.31399/asm.cp.istfa2017p0538

Using Volume Scan Diagnosis and Data Mining in the Electrical Failure Analysis Flow for Production Yield Ramp

Hao Shen; Lance Shen; Pierce Xu; Wu Yang; Junna Zhong; Wu-Tung Cheng

ISTFA 2017; 544-549doi:https://doi.org/10.31399/asm.cp.istfa2017p0544

Scanning Probe Analysis

Nanoscale Strain Mapping via Photo-Induced Force Microscopy

Sung Park; Katie Park; Derek Nowak; Tom Albrecht; Erin Leigh Wood; Angela Hight Walker

ISTFA 2017; 602-605doi:https://doi.org/10.31399/asm.cp.istfa2017p0602

Fault Isolation of MOL and FEOL Buried Defects Using Conductive Atomic Force Microscopy as a Complement to Passive Voltage Contrast Imaging

Lucile C. Teague Sheridan; Linda Conohan; Chong Khiam Oh

ISTFA 2017; 606-609doi:https://doi.org/10.31399/asm.cp.istfa2017p0606

Latest Advancements in Nanoscale IR Spectroscopy for Characterization and Failure Analysis of Electronic Devices

Anirban Roy; Qichi Hu; Debra Cook; Eoghan Dillon; Kevin Kjoller

ISTFA 2017; 610-612doi:https://doi.org/10.31399/asm.cp.istfa2017p0610

Measurement of Dielectric Constant and Doping Concentration of a Cross-Sectioned Device by Quantitative Scanning Microwave Impedance Microscopy

D. Iyer; A. Messinger; R. Crowder; Y. Zhang; O. Amster; S. Friedman; Y. Yang; F. Stanke

ISTFA 2017; 613-617doi:https://doi.org/10.31399/asm.cp.istfa2017p0613

Failure Analysis for Space Applications

Case Study Failure Analysis of an Ultra-High Vacuum Enclosure Made of a Silicon Chip and Borosilicate Glass for the Cold Atom Laboratory

Gil Garteiz; Javeck Verdugo; David Aveline; Eric Williams; Arvid Croonquist; Richard Blank

ISTFA 2017; 618-620doi:https://doi.org/10.31399/asm.cp.istfa2017p0618

VLSI for Space Applications—Single Event Effect Investigation and Optical Analysis on an Integrated Laser Platform

Samuel Chef; Chung Tah Chua; Yu Wen Siah; Philippe Perdu; Chee Lip Gan; Soon Huat Tan; Lian Ser Koh

ISTFA 2017; 621-630doi:https://doi.org/10.31399/asm.cp.istfa2017p0621

Failure Analysis Case Study of a 1.5 Meter Space Flex Harness

Erick Kim; Kamjou Mansour; Gil Garteiz; Javeck Verdugo; Ryan Ross; Saverio D’Agostino; Richard Blank

ISTFA 2017; 631-634doi:https://doi.org/10.31399/asm.cp.istfa2017p0631

Case Study—Failure Analysis of a Printed Circuit Board Latent Failure and Resulting Implication of Weaknesses in Panel Coupons and Lot DPA

Tom Tuite

ISTFA 2017; 635-642doi:https://doi.org/10.31399/asm.cp.istfa2017p0635

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ISTFA 2017; iv-vidoi:https://doi.org/10.31399/asm.cp.istfa2017fm01